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Surface modification and fabrication of 3D nanostructures by atomic layer deposition
11.25.11 | mat-gen/1111002Full Text External Link Indicator
Changdeuck Baea, Hyunjung Shina and Kornelius Nielscha, MRS Bulletin November 2011 36 : pp 887-897.
 Tags : Atomic Layer Deposition, Fabrication, Nanostructures
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Atomic Layer Deposition, Fabrication, Nanostructures

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